greenspecbusiness
반도체 & 디스플레이
Robots
Parts Repair
Cleaning Service
Focus-ring Coating
Available Rebots & Greenspec Capability
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- MAGNATRAN 7.1 (Brooks)
- ㆍVacuum Robot
- ㆍSingle/Dual/LeapFrog Arm
Major OEM: Novellus/Lam
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- GenMark Robot & Controller
- ㆍATM Robot
- ㆍSingle Arm
- ㆍGB3/GB4/GB4P
- ㆍController with robot
Major OEM: Cannon
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- Equipe(PRI) Robot & Controller
- ㆍATM Robot
- ㆍATM/ABM-100,200,300,400
- ㆍDBM Series
- ㆍESC Controller
Major OEM:KLA/ThermaWave/Others
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- Other Products
- ㆍAcuLigner
- ㆍVCE
- ㆍAligner
Major OEM: Novellus/Lam
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- MAGNATRAN 70 & 74 (Brooks)
- ㆍLCD PRODUCTION ROBOT
- ㆍSingle Arm/Dual Arm
Major OEM: AKT
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- MULTITRAN 5 (Brooks)
- ㆍVacuum Robot
- ㆍSingle/Dual Arm
Major OEM: Novellus /Lam
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- MAGNATRAN 60
- ㆍLCD PRODUCTION ROBOT
- ㆍSingle Arm
Major OEM: ANELVA,UNAXIS
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- ROBOT ARM (Brooks)
- ㆍVacuum robot arm
- ㆍSingle/dual/leapfrog Arm
Major OEM: Novellus/Lam
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- Acu / AquaTran – Series
- ㆍATM Robot
- ㆍSingle Arm
Major OEM: Novellus/Lam
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- Reliance
- ㆍATM Robot
- ㆍSingle Arm
Major OEM: Novellus /Lam
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- RR700
- ㆍATM Robot
- ㆍSingle Arm
Major OEM: AMAT CMP
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- RR701
- ㆍATM Robot
- ㆍDual Arm
- ㆍFABS wafer transfer robot
Major OEM:ULvac/Novellus/Nikon/Cannon
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- RR717,713
- ㆍATM Robot
- ㆍDual Arm
- ㆍ300mm
Major OEM: Ulvac/AMAT
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- RR304
- ㆍATM Robot
- ㆍSingle Arm
Major OEM: Ramco/etch
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- RA301
- ㆍATM wafer aligner
- ㆍ200mm only
Major OEM:Novellus/Ulvac/Nikon
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- RA210
- ㆍATM wafer aligner
- ㆍ300mm
Major OEM: Nikon/Cannon
300mm Robots & Armsets (Brooks Products)
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- Reliance ATR8
- ㆍ300mm Fabs robot/front robot
- ㆍoperate with Aculigner
Major OEM:Novellus/Lam
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- Act/Aqua Tran ATR7
- ㆍ300mm Copper process robot
- ㆍ300mm Febs robot/front robot
Major OEM: Novellus
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- 300mm Armsets&Aculigner
CMP Parts & Repair Service
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- Gear Head P Series (STOBER)
- ㆍAMAT LK CMP
- ㆍAMAT Reflexion CMP
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- Yaskawa AC Servo Motor
- ㆍAMAT Reflexion CMP
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- Kollmorgen DDR Motor
- ㆍATM LK CMP
- ㆍAMAT Reflexion CMP
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- Sanyo Denki AC Servo Motor
- ㆍATM LK CMP
- ㆍAMAT Reflexion CMP
- Service Capability
- ㆍKollmorgen DDR Motor
- ㆍSanyo Denki AC Servo Motor
- ㆍ Yaskawa AC Servo Motor
- ㆍ Platen Gear Box
- Cost Reduction
- ㆍ~70% cost savings vs. OEM and Maker
- Quality Test
- ㆍEnsure proper function and operation
- Exchange Service
- ㆍMany module types in stock for exchange
- ㆍ Reduces delivery time
Vaporizer Unit on DCVD / MCVD / ALD for Liquid Chemical Processes
- Equipment & Process
- ▶ Major Equipment : AMAT / NVLS / ASM / MATSON / TEL / LOCAL EQUIPMENT
- - Process : Barrier Meta(TDMAT/TICL) / ILD / IMD / ACL / ALD / Low K(OMCTS/TMCTS/3MS/4MS) / ETC
- - Source Materials : TEOS(SI(C2H5O)4), TEB(C6H15BO3), TEPO(C6H15O4P). TMA/TICL4/ALFA-4(C5H8),OMCTS(C8H24O4SI4), TMCTS(C4H16O4SI4), TDMAT
- - Vaporizer Type : IV TYPE, MV TYPE, VU TYPE, LFC
- - Problems : Gas Pressuer Increase (Micro Liquid particles, Nozzle Clogging, and contamination)
- Cost Savings
- ▶ 30% cost saving versus competitors and OEM suppliers
- Lead Time
- ▶ 2 weeks delivery after receiving module from customer
- Technology and Guarantee
- ▶ Highly efficient cleaning
- Reduced failures
- Guaranteed particle specifications
- ▶ Consistent cleaning procedure for all types of LMFM (no contamination)
- ▶ 4 months warranty
Diamond Coating – ON Silicon, SiN, SiC Focus Ring
Diamond Coting On Silicon Ring
- Si- Before Coating
- Si- After Coating
- 공정 Morphology
Diamond Coting On Focus Ring Specification
| Coting Material | 코팅두께 | NCD Nano Crystalline |
MCD Micro Crystalline |
BDD Boron 도핑 |
Max Coting Size |
|---|---|---|---|---|---|
| Si focus Ring | 1nano~ 50㎛ | OK | OK | OK | 350X375mm |
| SiC Focus ring | 1nano~ 50㎛ | OK | OK | OK | 350X375mm |
| SiN Focus Ring | 1nano~ 50㎛ | OK | OK | OK | 350X375mm |
| Hardness | kg/mm2 | 10,000 | 10,000 | 10,000 | |
| Doped Resistivity | Ω-cm | 1013~1016 | 1013~1016 | .05to10 |