greenspecbusiness

Automate Inspection

High Speed Laser Autofocus System

LAF1-GS

The LAF1-GS is a device that can trace the focal point of specimens with high speed (250Hz). The LAF1-GS can also find the accurate position of focus using ‘TTL(Through The Lens) methods‘ which shares the same optical axis with microscopes.

It operates not only between a tube lens and a CCD camera but also between an objective lens and a tube lens of infinity corrected optical microscopes.

The LAF1-GS finds a focal point of the target while the target is moving or is in environment with harsh vibration. If a specimen is moving, the LAF1-GS can trace the focal point simultaneously

Features
ㆍIt is working on most types of surfaces

-Reflective and diffusing

-Low reflectivity surfaces

-Transparent and opaque

-Plain, patterned and textured

ㆍAvailable with objective lens from 5X to 100X
ㆍProgrammable parameter for different working conditions
ㆍHigh Resolution CMOS sensor inside
Laser Repair
ㆍFlat Panel Display
ㆍPatterned Wafer Inspection
ㆍWafer Processing
ㆍPhoto-Mask Inspection and Repair
ㆍLaser Micro-Machining
Controller [LAFC1-GS-C]
ㆍSampling frequency :

- Max. 1[KHz] (250Hz Normally)

ㆍCommunication to User PC:

- Giga Ethernet

ㆍDSP : 2 Cores, 1[GHz]
ㆍDIO : input x 8CH, output x8CH
Head [LAF1-GS-H]
ㆍLaser Diodes : l = 680[nm](Default)
ㆍCMOS sensor
Software
ㆍUser Interface
ㆍAPI
option
-Microscope
ㆍInfinity Corrected Optical Microscope with CCD
ㆍObjective Lenses
ㆍRotary Turret
-Linear Actuator
ㆍAn objective lens can be attached to and moved by the linear actuator.
ㆍThe linear actuator makes response time faster
• Specification
Microscope Lens VIS VIS VIS NIR NIR
Magnification 2.5X 5X 10X 20X 50X
Focus Resolution [㎛] ′ <50 <10 <2 <1.5 <0.4
Focus Ranfe[㎛] ±2000 ±1000 ±300 ±300 ±100

ㆍThe smallest resolvable distance in photo sensor